ATOMIC-FORCE MICROSCOPY FOR THIN-FILM ANALYSIS

Authors
PHILLIPS RW
Citation
Rw. Phillips, ATOMIC-FORCE MICROSCOPY FOR THIN-FILM ANALYSIS, Surface & coatings technology, 68, 1994, pp. 770-775
Citations number
4
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
68
Year of publication
1994
Pages
770 - 775
Database
ISI
SICI code
0257-8972(1994)68:<770:AMFTA>2.0.ZU;2-A
Abstract
Atomic force microscopy (AFM) was used to study a variety of surface e ffects present in embossed structures, thin film coatings, and polymer ic substrates. Comparisons between scanning electron microscopy (SEM), optical microscopy and stylus methods of characterizing surface morph ology show that AFM reveals information in three-dimensional format no t previously available.