A plasma source that can be linearly scaled has been developed for the
removal of rolling oils from metal surfaces in reactive plasmas. In t
his paper, the design and performance of this source are presented. Su
rface cleanliness is evaluated by the contact angle with water. The ef
fect of oxygen plasma on oil removal is further investigated by X-ray
photoelectron spectroscopy. The cleaning process is illustrated using
aluminum and stainless steel foils.