Ion kinetic investigations were performed during the deposition of PMM
A (Polymethylmethacrylate) films using a 27.12 MHz driven parallel pla
te discharge configuration. The time dependent change of total pressur
e, partial pressures and growth rate were measured and the quantitativ
e concentration of the most important gaseous reaction products is sho
wn, which allows the observed growth rate to be understood At the grou
nded electrode of the discharge arrangement, ion mass spectra and ion
energy distributions were measured. in the ion mass spectra a large nu
mber of higher molecular weight ions was found.