THE INFLUENCE OF AR-BEAM INCIDENCE ANGLE ON THE DEPTH RESOLUTION IN AES( AND XE+ ION)

We have studied experimentally the influence of the angle of incidence (theta = 0 degrees, 5 degrees, 20 degrees, 35 degrees, 65 degrees and 80 degrees) upon the depth resolution, Delta z, of Auger electron spe ctroscopy (AES) on multilayer Cr/Ni structures sputter-etched by Ar+ a nd Xe+ beams. For given values of angle a and depth z, significantly l ower values of Delta z were achieved with the beams of Xe+ than with A r+ for angles of incidence ranging from 0 degrees to 65 degrees. For t heta = 80 degrees, the values of Delta z were practically identical fo r both gases. It can be deduced from the measurements, that the differ ence in surface roughness can be a consequence of two processes: diffe rent extents of the channelling effect and different ratios of the spu ttering rates within the grains of the metals(Cr,Ni) and at the bounda ries of grains formed by oxides of the respective metals by the two ga ses, argon and xenon.