SURFACE ROUGHENING RESULTING FROM ION IRRADIATION OF MULTILAYERED MATERIALS

The surface topography of multilayered W/Cu structures is studied afte r 100-340 keV Ne+ and Ar+ irradiation in the range of fluences up to 1 0(17) cm(-2) employing the stylus method The characteristic features o n the surface are correlated with the experimental results obtained wh en measuring stress relaxation during ion irradiation by employing the bending technique and free-lattice parameter using the sin(2) psi met hod. Surface roughness, as a function of sputtering and target paramet ers, is analyzed Theoretically and experimentally Qualitative agreemen t is obtained. The correlation between the surface characteristic feat ures initiated by ion irradiation and stress relaxation processes in m ultilayers is demonstrated.