REAL-TIME INVESTIGATIONS OF GAAS SURFACE CLEANING WITH A HYDROGEN ELECTRON-CYCLOTRON-RESONANCE PLASMA BY OPTICAL REFLECTION SPECTROSCOPY

Authors
WEEGELS LM SAITOH T KANBE H
Citation
Lm. Weegels et al., REAL-TIME INVESTIGATIONS OF GAAS SURFACE CLEANING WITH A HYDROGEN ELECTRON-CYCLOTRON-RESONANCE PLASMA BY OPTICAL REFLECTION SPECTROSCOPY, Applied physics letters, 65(24), 1994, pp. 3117-3119
Citations number
24
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
24
Year of publication
1994
Pages
3117 - 3119
Database
ISI
SICI code
0003-6951(1994)65:24<3117:RIOGSC>2.0.ZU;2-L