THERMODYNAMIC MODELING OF MOCVD OF ZRO2 FROM BETA-DIKETONATES AND DIFFERENT OXYGEN SOURCES

Chemical vapour deposition (CVD) of ZrO2 from three different beta-dik etonates - zirconium acetylacetonate, zirconium tetramethylheptanedion ate and zirconium trifluoroacetyl-acetonate - is thermodynamically inv estigated. O-2, H2O and N2O were used as oxygen sources. Both inert an d reactive substrates were employed. The effect of different depositio n parameters, such as gas phase composition, temperature and pressure, on the extension of the region where pure ZrO2 can be deposited was s tudied. The results are presented as calculated CVD stability diagrams .