CHARACTERIZATION OF AMORPHOUS TUNGSTEN TRIOXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING METHOD

Amorphous tungsten trioxide thin films were prepared using a rf magnet ron sputtering method. The relation between structure and electrochrom ic properties was investigated, At the macroscopic level, the films ha d dense structures. From Raman spectroscopic and X-ray radial distribu tion analyses, it was deduced that the networks were basically formed by three-, four- and six-membered rings of corner-sharing WO6 octahedr a, and in the films with low O/W atomic ratios many edge-sharing units were present. It was also found that the films with high O/W ratios s howed good electrochromic properties, which were closely related to th e six-membered rings,