ELIMINATION OF HYDROGEN-RELATED INSTABILITIES IN SI SIO2 STRUCTURES BY FLUORINE IMPLANTATION/

Authors
AFANASEV VV DENIJS JMM BALK P
Citation
Vv. Afanasev et al., ELIMINATION OF HYDROGEN-RELATED INSTABILITIES IN SI SIO2 STRUCTURES BY FLUORINE IMPLANTATION/, Journal of applied physics, 76(12), 1994, pp. 7990-7997
Citations number
46
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
76
Issue
12
Year of publication
1994
Pages
7990 - 7997
Database
ISI
SICI code
0021-8979(1994)76:12<7990:EOHIIS>2.0.ZU;2-3