RELIABLE HYBRID GASFETS FOR WORK-FUNCTION MEASUREMENTS WITH ARBITRARYMATERIALS

We have developed a novel hybrid technique for manufacturing gas-sensi ng field-effect structures (GasFETs) with an air gap. To prove the eff iciency of the device, gas measurements with the well-known Pt (sensit ive layer) and H-2 (gas) system have been carried out at room temperat ure. Samples produced identically show reproducible signals of the sam e magnitude. Simultaneously, we have recorded the electrical response of a platinum-coated Kelvin probe. Results obtained by the hybrid GasF ETs are transferrable to those obtained by the Kelvin probe. With the new technology for device fabrication, our transducer meets the requir ements for measuring work-function changes caused by gases on a wide v ariety of sensitive layers.