REACTIVE IONIC ETCHING OF HTSC FILMS

Authors
TIMOFEEV FN SMOLSKII OV SHMAEV AL KULAGINA MM
Citation
Fn. Timofeev et al., REACTIVE IONIC ETCHING OF HTSC FILMS, Pis'ma v Zurnal tehniceskoj fiziki, 20(9), 1994, pp. 16-22
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
20
Issue
9
Year of publication
1994
Pages
16 - 22
Database
ISI
SICI code
0320-0116(1994)20:9<16:RIEOHF>2.0.ZU;2-I