ELECTROSTATIC SOLUTIONS FOR A CAPACITIVE ULTRASONIC AIR TRANSDUCER WITH A UNIFORMLY V-GROOVED BACKPLATE

Authors
HIETANEN J IGNATIUS J STORPELLINEN J
Citation
J. Hietanen et al., ELECTROSTATIC SOLUTIONS FOR A CAPACITIVE ULTRASONIC AIR TRANSDUCER WITH A UNIFORMLY V-GROOVED BACKPLATE, Sensors and actuators. A, Physical, 45(2), 1994, pp. 95-98
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
45
Issue
2
Year of publication
1994
Pages
95 - 98
Database
ISI
SICI code
0924-4247(1994)45:2<95:ESFACU>2.0.ZU;2-Y
Abstract
Electrostatic solutions for a capacitive ultrasonic air transducer (CU T), consisting of a uniformly V-grooved backplate and a conductive mem brane, are presented. The electric field and charge distribution of a membrane-V-groove element are modelled using two approximation methods . The distribution illuminates the background of non-linear effects in CUTs. The solutions also give the capacitance of the transducer. The calculated capacitance values compare well with the measured values.