Cf. Chen et al., OPTICAL CHARACTERIZATION OF DIAMOND SYNTHESIZED USING CH4-CO2 GAS-MIXTURES WITHOUT SUPPLYING HYDROGEN GAS, Thin solid films, 253(1-2), 1994, pp. 162-167
Diamond films are the optical choice for IR window applications. Polyc
rystalline diamond films were synthesized in this study by microwave-p
lasma-assisted chemical vapour deposition (PACVD) using CH4 + CO2 as r
eactive gases. The primary purpose of this study is to determine the e
ffect of the deposition conditions on the optical properties of PACVD
diamond films. Room temperature optical properties of free-standing di
amond films were studied by Fourier transform IR spectroscopy. Experim
ental results indicate that the refractive index of diamond films is c
omparable with that of natural diamond. The scattering loss caused by
the rough surface of as-grown diamond film was reduced using a two-ste
p process and polishing techniques. The resulting reduction in scatter
ing loss increased the transmission intensity. For low temperature dep
osited diamond film the intensity of absorption due to carbon-hydrogen
stretch bands was higher than that for film deposited at a high tempe
rature. IR spectra are fitted with simulated spectra to determine the
background absorption caused by the amorphous carbon contained in the
films. Additionally, the background absorption of low temperature depo
sited diamond film was found to be larger than that of a diamond film
deposited at 850 degrees C.