Mv. Swain et J. Mencik, MECHANICAL PROPERTY CHARACTERIZATION OF THIN-FILMS USING SPHERICAL TIPPED INDENTERS, Thin solid films, 253(1-2), 1994, pp. 204-211
Ultra- or nano-indentation of thin films provides, in principal, a rel
atively simple approach to quantify the mechanical properties of thin
films. Considerable emphasis has been placed on the ability of pointed
indenters to measure such properties. An alternative indentation appr
oach that offers some advantages is the use of very small spherical ti
pped indenters. The latter provide a more tractable solution to the co
ntact problem. In addition it is possible to follow the elastic to pla
stic or brittle behaviour during indentation more clearly than with po
inted indenters. Greater insight to the actual behaviour of indented m
aterials may be obtained by complementary microstructural observations
of the indented region. Finally the role of substrate and interface a
dhesion on the force-displacement behaviour of thin films indented wit
h spherical tipped indenters is schematically summarized.