MULTILAYER ISFET MEMBRANES FOR MICROSYSTEMS APPLICATIONS

The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal proce ssing circuitry highly desirable. Chemical sensors use sensitive layer s which are not a part of MOS devices and in this sense, the determina tion of the best sensors and technological processes to achieve good i ntegrated smart sensors is very important. In this paper a study of co mpatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.