PREPARATION OF ULTRATHIN MICROCRYSTALLINE SILICON LAYERS BY ATOMIC-HYDROGEN ETCHING OF AMORPHOUS-SILICON AND END-POINT DETECTION BY REALTIME SPECTROELLIPSOMETRY

Authors
NGUYEN HV AN I COLLINS RW LU YW WAKAGI M WRONSKI CR
Citation
Hv. Nguyen et al., PREPARATION OF ULTRATHIN MICROCRYSTALLINE SILICON LAYERS BY ATOMIC-HYDROGEN ETCHING OF AMORPHOUS-SILICON AND END-POINT DETECTION BY REALTIME SPECTROELLIPSOMETRY, Applied physics letters, 65(26), 1994, pp. 3335-3337
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
26
Year of publication
1994
Pages
3335 - 3337
Database
ISI
SICI code
0003-6951(1994)65:26<3335:POUMSL>2.0.ZU;2-G