F. Bordoni et al., A SCANNING TUNNELING MICROSCOPE WITH A PIEZOELECTRIC-DRIVEN INERTIAL SLIDER, Sensors and actuators. A, Physical, 45(3), 1994, pp. 173-178
We report on a scanning tunneling microscope equipped with a piezoelec
tric inertial slider micropositioner. For any orientation, the propose
d device allows an approach down to the tunnelling distance from the t
ip. The approach process is fully automated by a personal computer tha
t generates the driving signals. Continuous motion at a speed of 5 mm
s-1 and single-step advancement down to 50 angstrom are obtained. The
microscope, due to its mechanical symmetry and rigidity, can operate w
ith atomic resolution, using a few stage vibration isolation stacks. T
he instrument can easily be modified to operate as an atomic force mic
roscope with a fibre-optic-interferometer displacement sensor.