OPTICAL MEASUREMENT OF THE ELASTIC-MODULI AND THERMAL-DIFFUSIVITY OF A C-N FILM

The elastic properties of carbon nitride (CN(x)) film adhered to a sil icon substrate were characterized through impulsive stimulated thermal scattering (ISTS). The lowest-order pseudo-Rayleigh acoustic mode of the film was excited and monitored optically. From the measured acoust ic phase velocities, the elastic moduli of the film were determined. T he ISTS technique also permits measurements of the CN(x) thermal diffu sivity. The noninvasive optical measurements described can provide a u seful guide to refinements in thin film fabrication procedures and for optimization of mechanical and thermal transport properties.