Thin epitaxial CeO2 films were prepared on (001) MgO and (1 $($) over
bar$$ 102) Al2O3 single crystal substrates by the aerosol MOCVD method
. X-ray diffraction analysis using a four-circle texture goniometer re
vealed small amount of in-plane misoriented CeO2 crystallites for the
MgO substrate and high epitaxial degree of CeO2 films deposited on (1
$($) over bar$$ 102) Al2O3.