CRYSTAL-STRUCTURE OF (SIC)(X)(ALN)(1-X) GROWN ON 6H-SIC BY MOCVD

Authors
WONGCHOTIGUL K SPENCER MG CHEN N PRASAD BD
Citation
K. Wongchotigul et al., CRYSTAL-STRUCTURE OF (SIC)(X)(ALN)(1-X) GROWN ON 6H-SIC BY MOCVD, Materials letters, 21(5-6), 1994, pp. 381-385
Citations number
10
Categorie Soggetti
Material Science","Physics, Applied
Journal title
Materials letters → ACNP
ISSN journal
0167577X
Volume
21
Issue
5-6
Year of publication
1994
Pages
381 - 385
Database
ISI
SICI code
0167-577X(1994)21:5-6<381:CO(GO6>2.0.ZU;2-R
Abstract
(SiC)(x)(AlN)(1-x) films were grown on (1000) 6H-SiC substrates by MOC VD. The crystal structures of alloys containing 20 and 80 mol% of AIN were observed using TEM. The electron diffraction pattern of the forme r sample shows 2H clusters mixed with cubic structure while the latter sample shows clearly separated columnary grains of 2H structure.