SIMPLE PHYSICAL MODEL OF GENERATION OF THE LOW-PRESSURE RADIO-FREQUENCY SUPERSONIC PLASMA-JET

Authors
SICHA M BARDOS L TICHY M SOUKUP L JASTRABIK L BARANKOVA H SOUKUP RJ TOUS J
Citation
M. Sicha et al., SIMPLE PHYSICAL MODEL OF GENERATION OF THE LOW-PRESSURE RADIO-FREQUENCY SUPERSONIC PLASMA-JET, Contributions to Plasma Physics, 34(6), 1994, pp. 749-764
Citations number
27
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Contributions to Plasma Physics → ACNP
ISSN journal
08631042
Volume
34
Issue
6
Year of publication
1994
Pages
749 - 764
Database
ISI
SICI code
0863-1042(1994)34:6<749:SPMOGO>2.0.ZU;2-Z
Abstract
The paper presents a simple theoretical model of the breakdown of the supersonic plasma jet generated by the hollow cathode discharge inside the nozzle in the low pressure RF plasma-chemical reactor. Through th e nozzle which is drilled in the RF electrode the working gas flows to the reactor chamber. If at the outlet of the nozzle the gas flow is s upersonic the well defined plasma jet is created inside the reactor ch amber. The results of our model are in qualitative agreement with expe rimental data.