ANALYSIS OF REFRACTIVE-INDEX PROFILE IN KTIOPO4 WAVE-GUIDE FORMED BY 3.0 MEV HE+ IMPLANTATION

The optical waveguide formation in X-cut KTiOPO4 was achieved by singl e energy implantation of 3.0 MeV He+ to a total dose of 2.0 X 10(16) i ons/cm(2) at liquid nitrogen temperature. The modes were examined by t he prism (LiTaO3) coupling method. The analysis of the refractive inde x profile in the KTiOPO4(100) waveguide was performed based on paramet rized index profile reconstruction (PIPR). We have used the TRIM (the transport of ions in matter) code to simulate the energy loss distribu tion. The result shows that the nuclear collision mostly influences th e refractive index profile, but the peak position of the refractive in dex profile is shallower than that of the nuclear energy loss distribu tion.