The lattice constants in the proton-exchanged waveguide layers formed
on the LiTaO3 substrate with and without the domain-inverted structure
are determined with the X-ray rocking curve method. The increase in l
attice constant caused by the proton-exchange process (DELTAc/c) is 0.
53%. The values DELTAc/c measured in the annealed proton-exchanged wav
eguides with domain-inverted slab structure, with the periodically dom
ain-inverted structure, and without the domain-inverted structure are
0.19%, 0.21% and 0.23%, respectively.