NB3SN THIN-FILMS MADE BY RF MAGNETRON SPUTTERING PROCESS WITH A NB3SNSINGLE TARGET FOR FRS (FIBER-REINFORCED SUPERCONDUCTOR)

Authors
AGATSUMA K TATEISHI H ARAI K SAITOH T SADAKATA N NAKAGAWA M
Citation
K. Agatsuma et al., NB3SN THIN-FILMS MADE BY RF MAGNETRON SPUTTERING PROCESS WITH A NB3SNSINGLE TARGET FOR FRS (FIBER-REINFORCED SUPERCONDUCTOR), Cryogenics, 34, 1994, pp. 847-850
Citations number
9
Categorie Soggetti
Physics, Applied",Thermodynamics
Journal title
Cryogenics → ACNP
ISSN journal
00112275
Volume
34
Year of publication
1994
Supplement
ICEC
Pages
847 - 850
Database
ISI
SICI code
0011-2275(1994)34:<847:NTMBRM>2.0.ZU;2-L
Abstract
We have been developing a high-field pulsed superconductor with a high elastic modulus fiber for reinforcement called FRS (Fiber Reinforced Superconductor). This FRS will be performed by magnetron sputtering te chniques of two opposed planar targets in future. In this process for a Nb3Sn single material target would be desired to be developed to sho rten the deposition process. We have succeeded in making a sputtering target which consists of Nb3Sn single material. The target is made fro m the reacted Nb3Sn powder. Nb3Sn thin films on MgO substrate were mad e using this target.