CHARACTERIZATION OF BRAGG REFLECTOR STRUCTURES USING SCANNING REFLECTANCE SPECTRAL MAPPING

Authors
BULITKA NJ MOORE CJL HENNESSY J TOMPA GS ZAWADZKI P WOLAK E
Citation
Nj. Bulitka et al., CHARACTERIZATION OF BRAGG REFLECTOR STRUCTURES USING SCANNING REFLECTANCE SPECTRAL MAPPING, Materials science & engineering. B, Solid-state materials for advanced technology, 28(1-3), 1994, pp. 457-460
Citations number
6
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
28
Issue
1-3
Year of publication
1994
Pages
457 - 460
Database
ISI
SICI code
0921-5107(1994)28:1-3<457:COBRSU>2.0.ZU;2-X
Abstract
A technique for assessing full wafer AlAs/GaAs Bragg reflector structu res by measuring the normalized reflectance at an array of points over a wafer is presented in this paper. High resolution maps allow statis tically meaningful calculations to be performed and also show reflecta nce patterns relating back to the deposition process. Specific example s illustrating the utility of this technique in facilitating the optim ization of the epitaxial layer deposition process are given.