B. Lepine et al., APPLICATION OF ANGLE-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY TO THESTUDY OF GAAS(001) SURFACES AND METAL GAAS(001) INTERFACES, Materials science & engineering. B, Solid-state materials for advanced technology, 28(1-3), 1994, pp. 527-530
GaAs (001) surfaces and metal/GaAs (001) interfaces were investigated
by angle resolved X-ray photoelectron spectroscopy and these studies a
re presented as examples of the application of this technique. By anal
ysing the photoemission mean intensity from normal to grazing incidenc
e on a GaAs (001) substrate decapped and annealed, it was possible to
determine the arsenic concentration in the topmost layers at the surfa
ce as a function of the annealing temperature. This technique is also
a structural probe since photoelectron diffraction effects in monocrys
talline samples give rise to modulations in the intensity when scannin
g the emission angle. Evidence was thus obtained of the lattice regist
ry of a YbAs overlayer with respect to a GaAs (001) substrate. The mix
ed (Yb-As) (010) crystallographic planes of YbAs position themselves i
n the prolongation of the pure As planes of GaAs. In the case of Ni de
positions performed on a GaAs (001) substrate, it was shown that Ni re
acts with GaAs to form two distinct reaction products, one Ga rich and
the other As rich.