THE LIGA PROCESS AND ITS POTENTIAL FOR MI CROSYSTEMS

We describe the LIGA process which allows the fabrication of both micr ostructures composed like metals, polymers, microstructures may be use d as sensors or as actuators within microsystems. The integration of L IGA components with microelectronic circuits leads to microsystems for manifold applications. A microspectrometer for analysis in the visibl e and near-infrared and a micropump that transports the liquids and ga ses to be analyzed are presented which can be combined to demonstrate a microanalytical microsystem for the determination of gases or liquid s. For both components we have been able to demonstrate their effectiv eness in use. By applying the plastic molding processes, mass producti on of both components, the micropump and the microspectrometer, has ex cellent chances in the future.