CHARACTERIZATION OF ROUGHNESS CORRELATIONS IN W SI MULTILAYERS BY DIFFUSE-X-RAY SCATTERING/

We present diffuse, nonspecular x-ray measurements of the interface he ight-height self-correlations in an amorphous W/Si multilayer. The mea surements have been performed in a scattering geometry that is placed out of the plane of reflection, giving access to a much larger range i n parallel momentum transfer than in conventional nonspecular geometri es. For the sample studied a logarithmic form of the correlation funct ion is found.