A micro Eddy Current Testing (ECT) system for planar thin specimens ma
de of INCONEL 600 with flaws was proposed and developed. A micro ECT p
robe used here consists of a conventional pancake-type coil as an exci
ting coil and a micro magnetic sensor array as a set of pickup coils.
Magnetic field perturbation due to a flaw was measured with high spati
al resolution and signal-to-noise (S/N) ratio. The measured signals fr
om the array were compared with numerical results obtained by a three-
dimensional A-phi code. It was confirmed that the micro ECT system has
the potential to evaluate the length and depth of a flaw with better
accuracy than that of a conventional pancake-type ECT in the steam gen
erator tubings in a pressurized water nuclear reactor.