Rk. Freitag et al., EVIDENCE FOR 2 TYPES OF RADIATION-INDUCED TRAPPED POSITIVE CHARGE, IEEE transactions on nuclear science, 41(6), 1994, pp. 1828-1834
New experimental evidence is presented that supports a model that assu
mes two distinguishable types of positive oxide charge following, x-ir
radiation. Two new experiments have been performed designed to separat
e the annealing properties of the two types of trapped positive charge
. It is found that one type of trapped positive charge can be permanen
tly removed at room temperature using substrate hot electron injection
. The second type of trapped positive charge is found to be stable at
temperatures up to 160 degrees C