DESIGN AND PERFORMANCE OF A RELIABLE AND LOW-COST SUBSTRATE HEATER FOR SUPERCONDUCTING THIN-FILM DEPOSITION

Citation
R. Campion et al., DESIGN AND PERFORMANCE OF A RELIABLE AND LOW-COST SUBSTRATE HEATER FOR SUPERCONDUCTING THIN-FILM DEPOSITION, Vacuum, 46(2), 1995, pp. 195-197
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
VacuumACNP
ISSN journal
0042207X
Volume
46
Issue
2
Year of publication
1995
Pages
195 - 197
Database
ISI
SICI code
0042-207X(1995)46:2<195:DAPOAR>2.0.ZU;2-T
Abstract
The design, construction, and performance of a simple substrate heater capable of operating at temperatures above 800 degrees C, either in v acuum or in oxygen, is described. The heater uses halogen projector bu lbs and has been employed in the deposition of YBCO superconducting th in films by sputtering and pulsed laser deposition. Performance data a re given for heating times and bulb life.