R. Campion et al., DESIGN AND PERFORMANCE OF A RELIABLE AND LOW-COST SUBSTRATE HEATER FOR SUPERCONDUCTING THIN-FILM DEPOSITION, Vacuum, 46(2), 1995, pp. 195-197
The design, construction, and performance of a simple substrate heater
capable of operating at temperatures above 800 degrees C, either in v
acuum or in oxygen, is described. The heater uses halogen projector bu
lbs and has been employed in the deposition of YBCO superconducting th
in films by sputtering and pulsed laser deposition. Performance data a
re given for heating times and bulb life.