Atomic layer growth control of SrCuO2-based artificial lattices is dem
onstrated on a SrTiO3(001) surface. Precise control of atomic layer gr
owth has been successfully carried out by in situ monitoring of the RH
EED intensities. It was found that the interface layer between the sub
strate surface and the material to be grown must be carefully construc
ted and that the introduction of two layers of Sr-O was necessary for
the epitaxial growth of tetragonal SrCuO2.