PLASMA-ASSISTED CVD FOR LOW-TEMPERATURE COATINGS TO IMPROVE THE WEAR AND CORROSION-RESISTANCE

In this study the logical successive development is described from the rmal CVD (900-1100 degrees C) over plasma assisted CVD (PACVD) (450-55 0 degrees C) to the very low temperature deposition by means of metall o-organic PACVD (MO-PACVD) down to 140 degrees C and their respective applications. The deposition of TiN, TiC, TiCN, ZrCN, ZrBCN, BCN singl e and multilayer systems was investigated on steel substrates, hard me tals, cermet substrates and age hardening aluminium alloys. Optical em ission spectroscopy was used to identify the species in the electrical discharge during the plasma assisted processes and applied for proces s optimization and control. The microstructure, chemical composition a nd hardness of the layer systems were investigated. Corrosion and wear behavior of coated samples and cermet tools were evaluated. Field tes ts of dies in aluminium pressure die casting show the substantial impr ovement reached by functional coatings.