H. Kersten et al., INVESTIGATIONS ON PLASMA-ASSISTED SURFACE CLEANING OF ALUMINUM CONTAMINATED WITH LUBRICANTS, Surface & coatings technology, 86-7(1-3), 1996, pp. 762-768
Aluminum and silicon plates contaminated with hydrocarbon-containing l
ubricants were treated with Ar, O-2 and H-2 plasma at different discha
rge modes (d.c.: anomalous glow regime, hollow cathode regime, r.f., a
nd silent discharge). During the plasma process the discharge was moni
tored by means of optical emission spectroscopy. Simultaneously, the r
emoval of the contamination layers was observed by means of in situ el
lipsometry. The temporal change of the spectral line intensities and o
f the ellipsometric parameters psi and Delta during the cleaning proce
ss were taken as a measure for the state of the surface. Because the t
hermal stress of the material is an important parameter in technologic
al application, the energy inflow towards the substrate surface during
plasma treatment has also been studied carefully.