We have studied the chain conformation and nanomechanical properties o
f pure alkylsiloxane monolayers and the mixed films with fluorine-cont
aining species using scanning force microscopy (SFM) and infrared-visi
ble sum-frequency generation spectroscopy (IV-SFG). Our IV-SFG spectra
yield information about the chain ordering and surface density of spe
cific species in the pure and mixed monolayers. A film formation proce
ss involving preferential adsorption of the fluorinated species from s
olution was observed. On the basis of the SFM measurements, the stiffn
ess of alkylsiloxane monolayers under load was found to increase with
the chain length, changes of chain conformation, and alkyl chain fluor
ination.