SPATIALLY AND TEMPORALLY RESOLVED ABSOLUTE O-ATOM CONCENTRATIONS IN ETCHING PLASMAS

Authors
TSEREPI AD MILLER TA
Citation
Ad. Tserepi et Ta. Miller, SPATIALLY AND TEMPORALLY RESOLVED ABSOLUTE O-ATOM CONCENTRATIONS IN ETCHING PLASMAS, Journal of applied physics, 77(2), 1995, pp. 505-511
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
2
Year of publication
1995
Pages
505 - 511
Database
ISI
SICI code
0021-8979(1995)77:2<505:SATRAO>2.0.ZU;2-P