EFFICIENT TABULATION OF PLASMA SURFACE INTERACTION DATA

The Maximum Entropy method is applied to characterize distribution fun ctions obtained by Monte Carlo simulations for plasma surface interact ions. Examples are depth distributions of implanted projectiles and en ergy distributions of backscattered and sputtered atoms. It turns out that such plasma relevant distribution functions can be reconstructed efficiently from a few low-order moments of the distribution. The reco nstruction of the underlying distribution is accomplished by Maximum E ntropy analysis. This procedure allows an efficient tabulation of plas ma surface interaction data and a considerable speed-up of the Monte C arlo simulation.