CONDENSATION OF COMPOUND FILMS IN THE AIRLOCK UNIT OF AN ELECTRON-MICROSCOPE

Authors
KUKUEV VI LESOVOI MV VLASOV DA MALYGIN MV DOMASHEVSKAYA EP TOMASHPOLSKII YY
Citation
Vi. Kukuev et al., CONDENSATION OF COMPOUND FILMS IN THE AIRLOCK UNIT OF AN ELECTRON-MICROSCOPE, Instruments and experimental techniques, 37(4), 1994, pp. 511-512
Citations number
7
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
37
Issue
4
Year of publication
1994
Part
2
Pages
511 - 512
Database
ISI
SICI code
0020-4412(1994)37:4<511:COCFIT>2.0.ZU;2-E
Abstract
A system to obtain the laser ablation of materials and condense the va por on a substrate inside the sample holder of a microscope was design ed around the airlock unit of the EVM-100LM electron microscope. The s ubstrate is heated by a laser beam to 1000 degrees C. The system has b een used to study the initial growth stages of an HTSP film.