Surface morphology dependence of MgO(100) on the variation of the anne
aling temperatures and times dth the intermediate chemical etching are
investigated by Auger electron spectroscopy (AES), atomic force micro
scopy (AFM) and reflection high energy electron diffraction (RNEED). A
ES spectra reveal that Ca segregates on the substrate surface in the h
igher temperature than 850 degrees C and this segregation can be compl
etely removed by chemical etching with P2O5 + 2-propanol. The AFM obse
rvation clarifies that the different reconstruction of MgO(100) surfac
e remarkably undergoes over 1000 degrees C.