Ly. Lin et al., MICRO-MACHINED 3-DIMENSIONAL MICROOPTICS FOR INTEGRATED FREE-SPACE OPTICAL-SYSTEM, IEEE photonics technology letters, 6(12), 1994, pp. 1445-1447
Novel, integrable three-dimensional micro-optical elements have been r
ealized by surface micromachining technology, Rotatable mirrors, lense
s and beam-splitters standing perpendicular to the substrate are demon
strated, The optical elements are precisely hold at 90 degrees angle t
o the substrate by side latches, The Si substrate serves as a ''micro-
optical bench'' on which monolithic micro-optical systems consisting o
f movable and static micro-mirrors, lenses and other components are co
nstructed, The optical system is pre-aligned by photolithography. This
technology offers a new approach to free-space integrated optics and
low-cost optical packaging.