ACTIVATION-ENERGY OF ALUMINUM NITRIDE DEPOSITION FROM A CHLORIDE HYDRIDE SYSTEM

Authors
LEBEDEV AO MELNIK YV TSAREGORODTSEV AM
Citation
Ao. Lebedev et al., ACTIVATION-ENERGY OF ALUMINUM NITRIDE DEPOSITION FROM A CHLORIDE HYDRIDE SYSTEM, Russian journal of applied chemistry, 67(1), 1994, pp. 134-137
Citations number
17
Categorie Soggetti
Chemistry Applied
Journal title
Russian journal of applied chemistry → ACNP
ISSN journal
10704272
Volume
67
Issue
1
Year of publication
1994
Part
2
Pages
134 - 137
Database
ISI
SICI code
1070-4272(1994)67:1<134:AOANDF>2.0.ZU;2-8
Abstract
The activation energy of aluminum nitride deposition from the gas phas e in a chloride-hydride system has been determined experimentally.