EXACT-SOLUTIONS OF BALANCE EQUATION GOVERNING ION-BEAM-INDUCED COMPOSITION CHANGES AND SPUTTERING

Authors
SIGMUND P
Citation
P. Sigmund, EXACT-SOLUTIONS OF BALANCE EQUATION GOVERNING ION-BEAM-INDUCED COMPOSITION CHANGES AND SPUTTERING, Applied physics letters, 66(4), 1995, pp. 433-435
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
4
Year of publication
1995
Pages
433 - 435
Database
ISI
SICI code
0003-6951(1995)66:4<433:EOBEGI>2.0.ZU;2-4