MICROFABRICATION OF AN ELECTROLUMINESCENT POLYMER LIGHT-EMITTING DIODE PIXEL ARRAY

We describe a method to microfabricate a light emitting diode array wi th pixels based on conjugated electroluminescent polymers sandwiched b etween appropriate electrodes. This method, based on direct photoablat ion with the 193 nm emission of an excimer laser, maintains the proper ties of these unique polymers. The technique as described here has alr eady achieved an array of 20 mu m x 20 mu m pixels with enhanced elect roluminescence (EL) from these pixels and possible spectral tuning of the EL by the application of varying external field. This method can b e extended to achieve nanometer dimensionalities using near-field nano lithography. (C) 1996 American Institute of Physics.