We have investigated the atomic-scale structure and electronic propert
ies of GaN/GaAs superlattices produced by nitridation of a molecular b
eam epitaxially grown GaAs surface. Using cross-sectional scanning tun
neling microscopy (STM) and spectroscopy, we show that the nitrided la
yers are laterally inhomogeneous, consisting of groups of atomic-scale
defects and larger clusters. Analysis of x-ray diffraction data in te
rms of fractional area of clusters (determined by STM), reveals a clus
ter lattice constant similar to bulk GaN. In addition, tunneling spect
roscopy on the defects indicates a conduction band state associated wi
th an acceptor level of N-As in GaAs. Therefore, we identify the clust
ers and defects as nearly pure GaN and N-As, respectively. Together, t
he results reveal phase segregation in these arsenide/nitride structur
es, in agreement with the large miscibility gap predicted for GaAsN. (
C) 1996 American Institute of Physics.