MASS AND ENERGY-DISPERSIVE RECOIL SPECTROMETRY OF MOCVD GROWN ALXGA1-XAS

Citation
Sr. Walker et al., MASS AND ENERGY-DISPERSIVE RECOIL SPECTROMETRY OF MOCVD GROWN ALXGA1-XAS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 353(1-3), 1994, pp. 563-567
Citations number
12
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
ISSN journal
01689002
Volume
353
Issue
1-3
Year of publication
1994
Pages
563 - 567
Database
ISI
SICI code
0168-9002(1994)353:1-3<563:MAERSO>2.0.ZU;2-K
Abstract
Mass and energy dispersive Recoil Spectrometry (RS) has been employed to study stoichiometric variations in AlxGa1-xAs layers. Quantitative determination of x is an important problem in the production of device materials which is not easily solved with standard techniques. Ruther ford Backscattering Spectrometry (RES) has been used extensively in se miconductor research but overlap of signals in the backscattered ion s pectrum is an important limitation in the analysis of materials such a s AlxGa1-xAs which contain elements of low and similar masses. Particl e Induced X-ray Emission (PIXE) analysis has good elemental resolution for this class of materials but provides little depth resolution. RS enables the determination of separate energy spectra for individual or small groups of isotopes. This allows it to be used in many situation s where RES is inappropriate. It employs a heavy ion beam to cause con stituent nuclei to recoil from the target, and a Time of Flight and En ergy (ToF-E) detector to detect these recoiling nuclei. Appropriate ma ss selection of the ToF-E data allows the determination of depth distr ibutions for each element.