CHARACTERIZATION OF THIN-FILMS FOR BIOMATERIAL APPLICATIONS USING PIXE AND RES

Authors
TSUBOI Y ALBREKTSSON T SENNERBY L JOHANSSON C EKTESSABI AM
Citation
Y. Tsuboi et al., CHARACTERIZATION OF THIN-FILMS FOR BIOMATERIAL APPLICATIONS USING PIXE AND RES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 353(1-3), 1994, pp. 597-600
Citations number
12
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
353
Issue
1-3
Year of publication
1994
Pages
597 - 600
Database
ISI
SICI code
0168-9002(1994)353:1-3<597:COTFBA>2.0.ZU;2-I
Abstract
In this paper, the results of applying Proton Induced X-ray Emission ( PIXE) and Rutherford Backscattering Spectroscopy (RES) in order to det ermine the compositions of TiO2 thin films prepared by Ion Beam Assist ed Sputter Deposition (IBASD), are presented. The PIXE analysis of the oxide films determined, with high precision, the incorporation of imp urities and the variation of the ratio of the constituent elements, po ssible as a result of preferential sputtering, due to ion beam irradia tion. The results of the present investigation showed that the PIXE an alysis combined with RES can be effectively used for qualitative and q uantitative analysis of thin film on the surface and in the film-subst rate interface.