INFLUENCE OF THE OXIDATION PROCESS ON THE LUMINESCENCE OF HF-TREATED POROUS SILICON

HF-treated porous silicon (PS) was investigated in situ by photolumine scence (PL) in the red-orange region after treatments in various oxidi zing atmospheres. Oxidation in moist air induces a blue shift of the P L spectra with increasing oxidation time. The PL intensity of HF-treat ed PS decreases after treatment in dry oxygen. The PL intensity of HF- treated PS increases strongly after treatment in water atmosphere for treatment times up to 2 days and decreases for longer times, while the increase is enhanced in the red-orange region of the PL spectra. We f ound that the PL in the red-orange region of PS is correlated with the initial oxidation process of PS.