Ma. Hory et al., FOURIER-TRANSFORM IR MONITORING OF POROUS SILICON PASSIVATION DURING POSTTREATMENTS SUCH AS ANODIC-OXIDATION AND CONTACT WITH ORGANIC-SOLVENTS, Thin solid films, 255(1-2), 1995, pp. 200-203
The surface passivation of porous silicon is a determining factor in t
he emission efficiency of the material. The hydrogen surface coverage
has been shown to provide very efficient passivation. In this work, we
have performed Fourier transform IR (FTIR) measurements to monitor th
e Si-H surface coverage, which is readily obtained after the layer for
mation in HF, during different post-treatments (anodic oxidation and c
ontact with organic solvent) and to relate it to the emission efficien
cy. FTIR studies, performed at different steps of the electrochemical
oxidation, indicate that, during the anodic treatment, the hydrogen su
rface coverage is preserved and that the oxidation takes place on the
back bonds of the surface silicon atoms. The importance of the hydroge
n coverage is also shown by the analysis of porous layers treated in b
oiling CCl4 after formation. This treatment provokes the desorption of
the hydrogen atoms and results in a drastic decrease in the photolumi
nescence. When samples are immersed in boiling methanol after formatio
n, FTIR analyses show that there is also a partial loss of the hydroge
n coverage! but accompanied with an oxidation of the material, so that
no significant changes in the emission efficiency can be observed.