LUMINESCENCE PROPERTIES OF PLASMA-TREATED SILICON SURFACES

Authors
RUTER D ROLF S BAUHOFER W KLAR PJ WOLVERSON D
Citation
D. Ruter et al., LUMINESCENCE PROPERTIES OF PLASMA-TREATED SILICON SURFACES, Thin solid films, 255(1-2), 1995, pp. 305-309
Citations number
16
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
255
Issue
1-2
Year of publication
1995
Pages
305 - 309
Database
ISI
SICI code
0040-6090(1995)255:1-2<305:LPOPSS>2.0.ZU;2-T
Abstract
Luminescent silicon surfaces have been prepared either by reactive spa rk evaporation and subsequent redeposition or by plasma-enhanced chemi cal vapour deposition of silanes and certain dopants on silicon. Some properties of these materials and the mechanism of the blue-green phot oluminescence are discussed.