REALIZATION OF POROUS SILICON MEMBRANES FOR GAS SENSOR APPLICATIONS

Authors
TALIERCIO T DILHAN M MASSONE E GUE AM FRAISSE B FOUCARAN A
Citation
T. Taliercio et al., REALIZATION OF POROUS SILICON MEMBRANES FOR GAS SENSOR APPLICATIONS, Thin solid films, 255(1-2), 1995, pp. 310-312
Citations number
10
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
255
Issue
1-2
Year of publication
1995
Pages
310 - 312
Database
ISI
SICI code
0040-6090(1995)255:1-2<310:ROPSMF>2.0.ZU;2-Q
Abstract
In this paper we report on the elaboration of porous silicon membranes for gas sensor applications. We attempted to replace the Teflon membr ane of an oxygen sensor by a porous silicon membrane. The sensor was o riginally designed to measure the concentration of oxygen dissolved in aqueous solutions and had to be slightly modified. Diffusion times in the range of 10 min have been found.